Equipment
Physical vapor deposition (PVD)
- Thermal evaporation systems for various materials and purposes
- E-beam evaporators (BAK 501Uni)
- DC and RF magnetron sputtering systems (Orion from AjA, CT200 sputter cluster from Alliance Concept)
Chemical vapor deposition (CVD)
- ALD system (Fiji CT2 from Ultratech)
- CVD systems
Wet processing
- Spin coaters
- Chemical bath deposition
Printing
- Inkjet printer (LP50 from Meyer Burger)
- Dispenser printer (350 PC Smart - Omega 300)
Photonic annealing
- Flash Lamp Annealing (PulseForge 1300 from Novacentrix)
- Tunable UV lamp
- Rapid thermal annealing system RTP (ASOne-150 from Annealsys)
- Deep UV system (UV253H from Filgen)
Laser processing
- Laser scribing system
Characterization
- UV-VIS Spectrophotometer (Shimadzu UV 3600)
- Solar cell characterization: I-V, EQE, IVT, admittance
- Time-resolve photoluminescence (MicroTime 100 PicoQuant)
- Profilometer (AlphaStep P120)
- Electroluminescence setup
- Accelerated lifetime testing (Stress chamber)
Thin film batteries
- Ar-filled glovebox line with in-situ transfer between sputter and evaporation chambers